Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system

Implementing efficient scheduling and dispatching policies is a critical means to gain competitiveness for modern semiconductor manufacturing systems. In contemporary global market, a successful semiconductor manufacturer has to excel in multiple performance indices, consequently qualified scheduling approaches should provide efficient and holistic management of wafer products, information and manufacturing resources and make adaptive decisions based on real-time processing status to reach an overall optimized system performance. To cope with this challenge, a timed extended object-oriented Petri nets (EOPNs) based multiple-objective scheduling and real-time dispatching approach is proposed in this paper. Four performance objectives pursued by semiconductor manufacturers are integrated into a priority-ranking algorithm that serves as the initial scheduling guidance, and then all wafer lots will be dynamically dispatched by the hybrid real-time dispatching control system. A set of simulation experiments validate the proposed multiple-objective scheduling and real-time dispatching algorithm may achieve satisfactory performances.

[1]  Li Lin,et al.  Multiple-Objective Scheduling for the Hierarchical Control of Flexible Manufacturing Systems , 1999 .

[2]  Liu Hui-ran.  An EOPN-Based Real-Time Scheduling Simulation Platform of Wafer Fabrication System , 2006 .

[3]  John W. Fowler,et al.  Genetic algorithm-based subproblem solution procedures for a modified shifting bottleneck heuristic for complex job shops , 2007, Eur. J. Oper. Res..

[4]  R. Uzsoy,et al.  A problem reduction approach for scheduling semiconductor wafer fabrication facilities , 2006, IEEE Transactions on Semiconductor Manufacturing.

[5]  John W. Fowler,et al.  Multi-Objective Semiconductor Manufacturing Scheduling: A Random Keys Implementation of NSGA-II , 2007, 2007 IEEE Symposium on Computational Intelligence in Scheduling.

[6]  John W. Fowler,et al.  A new scheduling approach using combined dispatching criteria in wafer fabs , 2003 .

[7]  Reha Uzsoy,et al.  A review of production planning and scheduling models in the semiconductor industry , 1994 .

[8]  Huiran Liu,et al.  Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets , 2005 .

[9]  Li-Chih Wang,et al.  Modeling with colored timed object-oriented Petri nets for automated manufacturing systems , 1998 .

[10]  Timon C. Du,et al.  Multiple response optimization in a fully automated FAB: an integrated tool and vehicle dispatching strategy , 2004, Comput. Ind. Eng..

[11]  C. R. Glassey,et al.  Dynamic batching heuristic for simultaneous processing , 1991 .

[12]  Mauricio G. C. Resende,et al.  Closed-loop job release control for VLSI circuit manufacturing , 1988 .

[13]  Karl G. Kempf,et al.  A hierarchical approach to production control of reentrant semiconductor manufacturing lines , 2003, IEEE Trans. Control. Syst. Technol..

[14]  Kurt Jensen,et al.  Coloured Petri nets (2nd ed.): basic concepts, analysis methods and practical use: volume 1 , 1996 .

[15]  Lars Mönch,et al.  A distributed shifting bottleneck heuristic for complex job shops , 2005, Comput. Ind. Eng..

[16]  Z. Jiang,et al.  Performance Modelling of Complex Dynamic Production Systems Using Temporised Object-Oriented Petri Nets with Changeable Structure (TOPNs-CS) , 2000 .

[17]  Fu-Kwun Wang,et al.  Development of a state-dependent dispatch rule using theory of constraints in near-real-world wafer fabrication , 2002 .