SIMS and auger investigation of thin a-SiC and a-SiC:H films by Up-Down sputtering DC magnetron, impact on optical properties
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Y. Belkacem | A. Keffous | A. Cheriet | N. Gabouze | H. Menari | M. Siad | C. Yaddaden | M. Ouadfel | A. Khelloufi