Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Abstract In recent years, the concept of e-Diagnostics and e-Maintenance is proposed in the semiconductor industry. By using Internet and information technologies, e-Diagnostics and e-Maintenance intend to provide equipment specialists with the remote capabilities of connectivity, manipulation, configuration, performance monitoring, and data collection and analysis on equipment to achieve the goal of promptly diagnosing, repairing, and maintaining equipment. In this paper, new-generation information software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc. are used to develop an e-Diagnostics/Maintenance framework with security considerations. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics and maintenance information under a secure communication infrastructure.

[1]  S. Ghoshal,et al.  Remote diagnosis server architecture , 2001, 2001 IEEE Autotestcon Proceedings. IEEE Systems Readiness Technology Conference. (Cat. No.01CH37237).

[2]  Siu Cheung Hui,et al.  An intelligent online machine fault diagnosis system , 2001 .

[3]  Fan-Tien Cheng,et al.  An object-based controller for equipment communications in semiconductor manufacturing , 2002 .

[4]  M. Locy.  The impact of e-diagnostics - one year later , 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

[5]  D. Eastlake,et al.  XML Encryption Syntax and Processing , 2003 .

[6]  Li Hongsheng,et al.  Internet-based remote diagnosis: concept, system architecture and prototype , 2000, Proceedings of the 3rd World Congress on Intelligent Control and Automation (Cat. No.00EX393).

[7]  R. A. Errath,et al.  Remote drive condition monitoring , 1999, 1999 IEEE/-IAS/PCA Cement Industry Technical Conference. Conference Record (Cat. No.99CH36335).

[8]  David M. Holburn,et al.  Remote Instrument Diagnosis on the Internet , 1998, IEEE Intell. Syst..

[9]  Jiawei Han,et al.  Data Mining: Concepts and Techniques , 2000 .

[10]  Fan-Tien Cheng,et al.  Development of a Web-services-based e-diagnostics framework , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[11]  Bruce Sohn.  International Symposium on Semiconductor Manufacturing , 2002 .

[12]  Jay Lee,et al.  Computer-aided maintenance : methodologies and practices , 1999 .

[13]  Takashi Iizumi,et al.  The development of security system and visual service support software for on-line diagnostics , 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

[14]  Mark Bartel,et al.  Xml-Signature Syntax and Processing , 2000 .