IR permittivities for silicides and doped silicon

The complex permittivity for Pt, Pd, Ni, and Ti-silicide films as well as heavily doped p- and n-type silicon were determined by ellipsometry over the energy range 0.031 eV to 4.0 eV. Fits to the Drude model gave bulk plasma and relaxation frequencies. Rutherford backscattering spectroscopy, X-ray diffraction, scanning electron microscopy, secondary ion mass spectrometry, and four-point probe measurements complemented the optical characterization. Calculations from measured permittivities of waveguide loss and mode confinement suggest that the considered materials are better suited for long-wavelength surface-plasmon-polariton waveguide applications than metal films.

[1]  K. Kjaer,et al.  Integrated optical components utilizing long-range surface plasmon polaritons , 2005, Journal of Lightwave Technology.

[2]  Azzouz Sellai,et al.  Surface plasmons on PtSi for visible and infrared Schottky-barrier-enhanced detection , 1992, Optics & Photonics.

[3]  S. Maier.  Plasmonics: Fundamentals and Applications , 2007 .

[4]  H. Lange,et al.  Optical Properties of High-Refractory Disilicide Thin Films , 1989 .

[5]  Nava,et al.  Optical properties of polycrystalline nickel silicides. , 1990, Physical review. B, Condensed matter.

[6]  L. Doolittle.  A semiautomatic algorithm for rutherford backscattering analysis , 1986 .

[7]  J. Lue,et al.  Ellipsometry measurements of nickel silicides , 1986 .

[8]  A. Rouault,et al.  Crystal growth, characterisation and resistivity measurements of Pd2Si single crystals , 1989 .

[9]  Chen,et al.  Optical constants of palladium silicides measured by a multiple-wavelength ellipsometer. , 1986, Physical review. B, Condensed matter.

[10]  J. Pimbley,et al.  Infrared optical constants of PtSi , 1983 .

[11]  B. Hunt,et al.  Optical properties of epitaxial CoSi2 and NiSi2 films on silicon , 1989 .

[12]  E. E. Bell,et al.  Far-Infrared Optical Constants of KI , 1971 .

[13]  R. J. Bell,et al.  Optical properties of fourteen metals in the infrared and far infrared: Al, Co, Cu, Au, Fe, Pb, Mo, Ni, Pd, Pt, Ag, Ti, V, and W. , 1985, Applied optics.

[14]  Yu. M. Mikhailova,et al.  Design rules for phase-matched terahertz surface electromagnetic wave generation by optical rectification in a nonlinear planar waveguide. , 2008, Applied optics.

[15]  Yu-Bin Chen,et al.  Development of mid-infrared surface plasmon resonance-based sensors with highly-doped silicon for biomedical and chemical applications. , 2009, Optics express.

[16]  Richard Soref,et al.  Longwave plasmonics on doped silicon and silicides. , 2008, Optics express.

[17]  J. Lue,et al.  Formation of titanium silicides and their refractive index measurements , 1987 .

[18]  G. Guizzetti,et al.  Optical properties of single-crystal titanium disilicide. , 1989, Physical review. B, Condensed matter.

[19]  A. Demkov,et al.  Electronic, optical, and surface properties of PtSi thin films , 2008 .

[20]  J. Faist,et al.  Quantum cascade laser with plasmon‐enhanced waveguide operating at 8.4 μm wavelength , 1995 .

[21]  Richard A. Soref,et al.  Silicides for infrared surface plasmon resonance biosensors , 2008 .

[22]  Kwok K. Ng,et al.  Complete guide to semiconductor devices , 1995 .

[23]  H. Grubin.  The physics of semiconductor devices , 1979, IEEE Journal of Quantum Electronics.

[24]  Wu,et al.  Ellipsometry and structure studies of chromium, molybdenum, and platinum silicides. , 1987, Physical review. B, Condensed matter.

[25]  R. W. Christy,et al.  Optical Constants of the Noble Metals , 1972 .

[26]  P. Y. Yu,et al.  Fundamentals of Semiconductors , 1995 .

[27]  Eugene A. Irene,et al.  Handbook of Ellipsometry , 2005 .

[28]  Karen Maex,et al.  Properties of metal silicides , 1995 .

[29]  Jonathan Martin Mooney.  Infrared optical absorption of thin PtSi films between 1 and 6 μm , 1988 .

[30]  H. Raether.  Surface Plasmons on Smooth and Rough Surfaces and on Gratings , 1988 .