论文信息 - On the origin of the premature breakdown of thermal oxide on 3C-SiC probed by electrical scanning probe microscopy - 字舞流文

On the origin of the premature breakdown of thermal oxide on 3C-SiC probed by electrical scanning probe microscopy

C. Bongiorno | F. Giannazzo | E. Schilirò | F. Roccaforte | P. Fiorenza | F. Via | M. Zielinski