The temperature drift suppression of mode-localized resonant sensors
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[1] A. Seshia,et al. Differential amplification of structural perturbations in weakly coupled MEMS resonators , 2010, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[2] Q. Shen,et al. Micromachined inertial measurement unit fabricated by a SOI process with selective roughening under structures , 2011 .
[3] M. Prunnila,et al. Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators , 2014, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.
[4] M. Kraft,et al. A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
[5] Zhang Jing,et al. Research on temperature compensation method of silicon resonant accelerometer based on integrated temperature measurement resonator , 2015, 2015 12th IEEE International Conference on Electronic Measurement & Instruments (ICEMI).
[6] M. Kraft,et al. An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators , 2016, Journal of Microelectromechanical Systems.
[7] Y. Hao,et al. Dicing-free SOI process based on wet release technology , 2016 .
[8] A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
[9] Honglong Chang,et al. A mode localization based resonant MEMS tilt sensor with a linear measurement range of 360° , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
[10] Qiang Shen,et al. Design and Verification of a Structure for Isolating Packaging Stress in SOI MEMS Devices , 2017, IEEE Sensors Journal.
[11] Honglong Chang,et al. Ambient pressure drift rejection of mode-localized resonant sensors , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
[12] Honglong Chang,et al. Characterization of forced localization of disordered weakly coupled micromechanical resonators , 2017, Microsystems & Nanoengineering.