Molecular-beam epitaxy of mercury-cadmium-telluride solid solutions on alternative substrates

Growth processes were considered for heteroepitaxial structures based on a mercury-cadmium-telluride (MCT) solid solution deposited on GaAs and Si alternative substrates by molecular-beam epitaxy. Physical and chemical processes of growth and defect-generation mechanisms were studied for CdZnTe epitaxy on atomically clean singular and vicinal surfaces of gallium-arsenide substrates and CdHgTe films on CdZnTe/GaAs surfaces. ZnTe single-crystalline films were grown on silicon substrates. Methods for reducing the content of defects in CdZnTe/GaAs and CdHgTe films were developed. Equipment for molecular-beam epitaxy was designed for growing the heteroepitaxial structures on large-diameter substrates with a highly uniform composition over the area and their control in situ. Heteroepitaxial MCT layers with excellent electrical parameters were grown on GaAs by molecular-beam epitaxy.

[1]  J. W. Matthews Defects associated with the accommodation of misfit between crystals , 1975 .

[2]  D. N. Pridachin,et al.  The heteroepitaxy of II–VI compounds on the non-isovalent substrates (ZnTe/Si) , 2000 .

[3]  V. G. Remesnik,et al.  The growth of high-quality MCT films by MBE using in-situ ellipsometry , 1994 .

[4]  Sergey A. Dvoretsky,et al.  Molecular beam epitaxy of high quality Hg1 − xCdxTe films with control of the composition distribution , 1996 .

[5]  M. Zandian,et al.  Dislocation density reduction by thermal annealing of HgCdTe epilayers grown by molecular beam epitaxy on GaAs substrates , 2008 .

[6]  Sergey A. Dvoretsky,et al.  The controlled growth of high-quality mercury cadmium telluride , 1995 .

[7]  E. A. Patten,et al.  Molecular beam epitaxial growth and performance of HgCdTe-based simultaneous-mode two-color detectors , 1998 .

[8]  Naoki Oda,et al.  Hybrid 256 x 256 LWIR FPA using MBE-grown HgCdTe on GaAs , 1995, Optics & Photonics.

[9]  Yu. G. Sidorov,et al.  Defect Formation during MBE Growth of CdTe (111) , 1991 .

[10]  W. Richter,et al.  Chemical reaction at the ZnSe/GaAs interface detected by Raman spectroscopy , 1990 .

[11]  S. Sivananthan,et al.  MBE P-on-n Hg1−xCdxTe heterostructure detectors on silicon substrates , 1998 .

[12]  William E. Tennant,et al.  Molecular beam epitaxy (MBE) HgCdTe flexible growth technology for the manufacturing of infrared photovoltaic detectors , 1994, Defense, Security, and Sensing.

[13]  Rajesh D. Rajavel,et al.  Molecular-beam epitaxial growth of HgCdTe infrared focal-plane arrays on silicon substrates for midwave infrared applications , 1998 .

[14]  Sergey A. Dvoretsky,et al.  Peculiarities of the MBE growth physics and technology of narrow-gap II-VI compounds , 1997 .

[15]  Owen K. Wu Status of HgCdTe MBE technology for IRFPA , 1993, Optics & Photonics.

[16]  J. Anderson,et al.  The Chemistry of Diamond-Like Semiconductors , 1965 .

[17]  Masaharu Oshima,et al.  Controlled passivation of GaAs by Se treatment , 1993 .

[18]  Yu. G. Sidorov,et al.  Defect formation during growth of CdTe(111) and HgCdTe films by molecular beam epitaxy , 1992 .