论文信息 - Microstructure of (100) silicon wafer implanted by 1 MeV Ru+ ions - 字舞流文

Microstructure of (100) silicon wafer implanted by 1 MeV Ru+ ions

G. Shao | Y. L. Chen | K. Homewood | R. Gwilliam | M. Goringe | K. Kirkby | G. Shao | J. Sharpe | K. P. Homewood | Y. Chen