Low-stress transfer bonding using floatation

A novel method for transferring thin, large-area polymer layers from a mould and its subsequent bonding to a destination substrate is presented here. Buoyancy is used for transfer via floatation to ...

[1]  Yunqi Liu,et al.  Top‐Gate Organic Thin‐Film Transistors Constructed by a General Lamination Approach , 2010, Advanced materials.

[2]  Seung S. Lee,et al.  Shrinkage ratio of PDMS and its alignment method for the wafer level process , 2007 .

[3]  Frank Niklaus,et al.  Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[4]  Ki-Dong Lee,et al.  High‐Resolution Patterning of Aluminum Thin Films with a Water‐Mediated Transfer Process , 2007 .

[5]  Karen Willcox,et al.  Kinetics and kinematics for translational motions in microgravity during parabolic flight. , 2009, Aviation, space, and environmental medicine.

[6]  Richard H. Friend,et al.  The origin of the open-circuit voltage in polyfluorene-based photovoltaic devices , 2002 .

[7]  T. Haraldsson,et al.  PCR on a PDMS-based microchip with integrated bubble removal , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[8]  Amos Maritan,et al.  Flory theory for polymers , 2013, Journal of physics. Condensed matter : an Institute of Physics journal.

[9]  Ronald S. Reiserer,et al.  Poly(vinyl alcohol) as a structure release layer for the microfabrication of polymer composite structures , 2007 .

[10]  3D integration of heterogeneous MEMS structures by stamping transfer , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[11]  N. Ayres,et al.  Water-Soluble Polymers , 2004 .

[12]  G. Whitesides,et al.  Water-soluble sacrificial layers for surface micromachining. , 2005, Small.

[13]  L. H. Thompson,et al.  Sonochemistry: Science and Engineering , 1999 .

[14]  L. J. Lee,et al.  Self-folding of three-dimensional hydrogel microstructures. , 2005, The journal of physical chemistry. B.

[15]  Yonggang Huang,et al.  Transfer printing by kinetic control of adhesion to an elastomeric stamp , 2006 .

[16]  D. Bradley,et al.  Polymer Transfer Printing: Application to Layer Coating, Pattern Definition, and Diode Dark Current Blocking , 2008 .

[17]  G.-J. Wang,et al.  Biodegradable polylactic acid microstructures for scaffold applications , 2008, ArXiv.

[18]  Richard H. Friend,et al.  Efficient Conjugated‐Polymer Optoelectronic Devices Fabricated by Thin‐Film Transfer‐Printing Technique , 2008 .

[19]  Charles D. Schaper,et al.  Water-soluble polymer templates for high-resolution pattern formation and materials transfer printing , 2004 .

[20]  T. Haraldsson,et al.  Low-stress wafer-level transfer bonding of polymer layers using floatation , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[21]  K. Kendall Crack propagation in lap shear joints , 1975 .

[22]  Ralph G Nuzzo,et al.  Decal transfer microlithography: a new soft-lithographic patterning method. , 2002, Journal of the American Chemical Society.

[23]  R. Larson,et al.  Planarization of Substrate Topography by Spin Coating , 1987 .