Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family

Versatile micro fluidic device "Biochemical IC Family" based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.

[1]  K. Ikuta,et al.  Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[2]  K. Ikuta.  Three Dimensional Micro Integrated Fluid Systems Fabricated by Micro Stereo Lithography , 1994 .

[3]  Koji Ikuta,et al.  Development of mass productive micro stereo lithography (Mass-IH process) , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[4]  Koji Ikuta,et al.  Biochemical IC chip toward cell free DNA protein synthesis , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[5]  K. Ikuta.  3D Micro Integrated Fluid System toward Living LSI -Challenge for Artificial Cellular Device- , 1996 .

[6]  K. Ikuta,et al.  Micro concentrator with opto-sense micro reactor for biochemical IC chip family. 3D composite structure and experimental verification , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).