论文信息 - Impact of pulse duration in high power impulse magnetron sputtering on the low-temperature growth of wurtzite phase (Ti,Al)N films with high hardness - 字舞流文

Impact of pulse duration in high power impulse magnetron sputtering on the low-temperature growth of wurtzite phase (Ti,Al)N films with high hardness

H. Komiya | Tetsuhide Shimizu | M. Yang | Tomotaro Watanabe | K. Morikawa | Y. Teranishi | H. Nagasaka | Ming Yang | Yoshikazu Teranishi