论文信息 - Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle - 字舞流文

Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

F. Roozeboom | W. Kessels | A. Mameli | A. Mackus | Marc J. M. Merkx | B. Karasulu | M. Merkx | Bora Karasulu