EUV scattering and flare of 10X projection cameras
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Kenneth A. Goldberg | Sherry L. Baker | Patrick P. Naulleau | James H. Underwood | Claude Montcalm | Eberhard Spiller | Jeffrey Bokor | John S. Taylor | Daniel G. Stearns | John E. M. Goldsmith | J. E. Bjorkholm | Eric M. Gullikson | E. Spiller | D. Stearns | J. Bokor | E. Gullikson | K. Goldberg | J. Bjorkholm | J. Goldsmith | J. Underwood | P. Naulleau | C. Montcalm | S. Baker | John S. Taylor
[1] Emil Wolf,et al. Principles of Optics: Contents , 1999 .
[2] Eric M. Gullikson. Scattering from normal-incidence EUV optics , 1998, Advanced Lithography.