论文信息 - TOF‐SIMS analysis of the surface of insulators. Examples of chemically modified polymers and glass

TOF‐SIMS analysis of the surface of insulators. Examples of chemically modified polymers and glass

A metod to compensate for surface charging of insulator surfaces during TOF-SIMS experiments is described. For this purpose a pulsed low energy electron source is used, immediately after the ion extraction period. The surface potential is self adjusting, resulting in a stable spectrum. Besides, ESD effects are strongly suppressed. Positive and negative ion spectra of thick PMMA and PC substrates, containing surface active additives and of UV-ozone cleaned glass substrates before and after trimethylsilylation are presented. From the glass samples the positive ESD spectra were also recorded by using a continuous electron beam. Comparison between the SSIMS and ESD results indicates that ESD is more surface sensitive and sufferes less from ion fragmentation than SSIMS.

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