Low voltage CMOS compatible power MOSFET for on-chip DC/DC converters
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1 A lateral Power MOSFET switch, implemented in a 0.25 /spl mu/m-5 metal CMOS process and suitable for high-frequency switch mode on-chip DC/DC converters is described in this paper. The fabricated device has an active chip area of 130 /spl mu/m/spl times/130 /spl mu/m and exhibits an on-resistance of 40.37 m/spl Omega/ (a specific on-resistance of 6.82 /spl mu//spl Omega/cm/sup 2/) and a total gate charge of 0.105 nC at V/sub GS/=3.3 V.
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