Effect of a Lateral Overgrowth Process on the Strain Evolution of AlN Films Grown on a Nanopatterned Sapphire Substrate for Ultraviolet‐C Light‐Emitting Diode Applications
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Shiping Guo | Xiaoxiao Sun | Tao Wang | Zhaoying Chen | Xinqiang Wang | Long Yan | Jason Hoo | Shangfeng Liu | Ye Yuan | S. Sheng