Micro fluid-handling systems: state of the art and opportunities

Research activities throughout the world concerning micro fluid-handling are reviewed. Pumps and ink-jet heads, valves and flow sensors are discussed. Many research groups are moving into this emerging field, usually, aiming at the development of complete systems for chemical analysis or medicine delivery. Some comments on future trends and opportunities are given.<<ETX>>

[1]  Scott D. Collins,et al.  The design and fabrication of a magnetically actuated micromachined flow valve , 1990 .

[2]  Michael A. Huff,et al.  A pressure-balanced electrostatically-actuated microvalve , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[3]  E. Bassous Fabrication of novel three-dimensional microstructures by the anisotropic etching of , 1978, IEEE Transactions on Electron Devices.

[4]  H. M. Widmer,et al.  The use of chemical sensors in industry , 1990 .

[5]  K. Petersen,et al.  Fabrication of an integrated, planar silicon ink-jet structure , 1979, IEEE Transactions on Electron Devices.

[6]  Shuichi Shoji,et al.  Prototype miniature blood gas analyser fabricated on a silicon wafer , 1988 .

[7]  S. Miyazaki,et al.  A piezo-electric pump driven by a flexural progressive wave , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[8]  A. W. van Herwaarden,et al.  High-sensivity 2-D flow sensor with an etched thermal isolation structure , 1990 .

[9]  N. Ahmad,et al.  Surface Acoustic Wave Flow Sensor , 1985, IEEE 1985 Ultrasonics Symposium.

[10]  H. Jerman,et al.  Electrically-activated, micromachined diaphragm valves , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[11]  R.J.G. Carr Fibre optic sensors for the characterization of particle size and flow velocity , 1990 .

[12]  Miko Elwenspoek,et al.  Resonating microbridge mass flow sensor , 1990 .

[13]  F.C.M. van de Pol,et al.  Micro Liquid-Handling Devices - A Review , 1990 .

[14]  J. G. Smits Piezoelectric micropump with three valves working peristaltically , 1990 .

[15]  A. Manz,et al.  Design of an open-tubular column liquid chromatograph using silicon chip technology , 1990 .

[16]  A. D. Johnson,et al.  Prototype micro-valve actuator , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[17]  Kurt E. Petersen,et al.  Variable-flow microvalve structure fabricated with silicon fusion bonding , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[18]  Ryo Miyake,et al.  A development of micro sheath flow chamber , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[19]  M. Esashi,et al.  Integrated micro flow control systems , 1990 .

[20]  T. Tamagawa,et al.  Surface-machined micromechanical membrane pump , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[21]  J. Branebjerg,et al.  A micromachined flow sensor for measuring small liquid flows , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[22]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[23]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .

[24]  R.M. White,et al.  Ultrasonically induced microtransport , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[25]  E. Bassous,et al.  Silicon charge electrode array for ink jet printing , 1978, IEEE Transactions on Electron Devices.

[26]  U. Bonne,et al.  Micromachined silicon microvalve , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[27]  Axel Richter,et al.  Electrohydrodynamic pumping and flow measurement , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[28]  J. Zemel,et al.  Liquid transport in micron and submicron channels , 1990 .

[29]  A. Manz,et al.  Miniaturized total chemical analysis systems: A novel concept for chemical sensing , 1990 .

[30]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[31]  Stephen F. Bart,et al.  Microfabricated electrohydrodynamic pumps , 1990 .

[32]  Masayoshi Esashi,et al.  Normally closed microvalve and mircopump fabricated on a silicon wafer , 1989 .

[33]  G. Stemme,et al.  New fluid filter structure in silicon fabricated using a self‐aligning technique , 1988 .