AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy
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M. Kneissl | M. Bickermann | C. Hartmann | P. Shields | P. Coulon | G. Kusch | T. Wernicke | C. Netzel | C. Trager-Cowan | M. Weyers | E. Ziffer | S. Walde | S. Hagedorn | G. Naresh-Kumar | A. Mogilatenko | N. Susilo | A. Alasmari | T. Straubinger | J. Weinrich | R. Martin | L. Matiwe