First Demonstration of Ultrafast Laser Annealed Monolithic 3D Gate-All-Around CMOS Logic and FeFET Memory with Near-Memory-Computing Macro
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Kun-Ming Chen | G. Huang | C. Hu | W. Yeh | Meng-Fan Chang | C. Pan | Je-Min Hung | Kai-Shin Li | C. Shen | J. Shieh | Da-Chiang Chang | Yen-Hsiang Huang | Wen-Hsien Huang | Bo-Yuan Chen | F. Hsueh | Chao-Cheng Lin | Cheng-Xin Xue | Sheng-Po Huang | Shih-Wei Chen | K. Lin | W. Chiu | S. Liu | Deng-Yan Niou