Computerized interferometric surface measurements [Invited].

The addition of electronics, computers, and software to interferometry has enabled enormous improvements in optical metrology. This paper discusses four areas in which computerized interferometric measurement improvements have been made in the measurement of surface shape and surface roughness: (a) The use of computer-generated holograms for the testing of aspheric optics, (b) phase-shifting interferometry for getting interferometric data into a computer so the data can be analyzed, (c) computerized interference microscopes, including multiple-wavelength and coherence scanning, for the precision measurement of surface microstructure, and (d) vibration-insensitive dynamic interferometers for enabling precise measurements in noncontrolled environments.

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