论文信息 - Comparison between spectroscopic ellipsometry and HRTEM-VEELS analyses of HfO 2-based stacks. - 字舞流文

Comparison between spectroscopic ellipsometry and HRTEM-VEELS analyses of HfO 2-based stacks.

D. Lafond | E. Martinez | C. Licitra | F. Bertin | P. Bayle-Guillemaud | A. Chabli | G. Audoit | C. Guedj | G. Auvert | N. Gambacorti