The mechanical sensitivity optimization of a disk resonator gyroscope with mutative ring thickness

In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then the optimized ring thickness distribution was obtained by using the bio-inspired particle swarm optimization (PSO) algorithm. The rule of the optimized ring thickness distribution is that the outer ring is thicker than the other rings (1.7-1.8 times for this DRG) whereas the other rings should be as thin as possible. Meanwhile the optimized distribution rules can be used on series of DRGs and the optimization methods can be widely used on other MEMS devices.

[1]  M. Esashi,et al.  Energy dissipation in submicrometer thick single-crystal silicon cantilevers , 2002 .

[2]  Robert T. M'Closkey,et al.  Modal Parameter Tuning of an Axisymmetric Resonator via Mass Perturbation , 2015, Journal of Microelectromechanical Systems.

[3]  Xiang Xi,et al.  A study on Q factor of the trimmed resonator for vibratory cupped gyroscopes , 2014 .

[4]  J. Cho.  High-performance micromachined vibratory rate- and rate-integrating gyroscopes , 2012 .

[5]  K. Najafi,et al.  A HARPSS polysilicon vibrating ring gyroscope , 2001 .

[6]  John Y. Liu,et al.  Boeing Disc Resonator Gyroscope , 2014, 2014 IEEE/ION Position, Location and Navigation Symposium - PLANS 2014.

[7]  K. Townsend,et al.  Precision mode matching of MEMS gyroscope by feedback control , 2011, 2011 IEEE SENSORS Proceedings.

[8]  Jonathan James Lake,et al.  Particle Swarm Optimization for Design of Slotted MEMS Resonators With Low Thermoelastic Dissipation , 2014, Journal of Microelectromechanical Systems.

[9]  Siavash Pourkamali,et al.  A finite element analysis of thermoelastic damping in vented MEMS beam resonators , 2013 .

[10]  Andrei M. Shkel,et al.  Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators , 2014, Journal of Microelectromechanical Systems.

[11]  F. Ayazi,et al.  A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability , 2008, Journal of Microelectromechanical Systems.

[12]  James Kennedy,et al.  Particle swarm optimization , 2002, Proceedings of ICNN'95 - International Conference on Neural Networks.

[13]  Thomas W. Kenny,et al.  Temperature Dependence of the Elastic Constants of Doped Silicon , 2015, Journal of Microelectromechanical Systems.

[14]  Alberto Corigliano,et al.  Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope , 2015, Scientific Reports.

[15]  M. A. Philippine,et al.  Topology Optimization of Stressed Capacitive RF MEMS Switches , 2013, Journal of Microelectromechanical Systems.