Implementation of SIW Cavity in Commercial CMOS Technology for Sub-Terahertz Band Applications

For sub-terahertz band applications, two compact and low-loss on-chip substrate integrated waveguide (SIW) cavities are designed in CMOS technology. Compact size cavity is achieved by utilizing the folded ridge structure in the quarter mode SIW (QMSIW) structure which is loaded with complementary split-ring resonators (CSRRs). Two prototypes of the proposed QMSIW cavities with and without CSRR are fabricated in 1P6M CMOS technology. From the measurement, both cavities present return losses higher than 27 dB and external Q-factors higher than 140. The proposed work shows that even at such high frequencies, compact and low-loss SIWs can be fabricated in commercial CMOS technology and opens a window to utilizing such cavities for other low-loss components such as oscillators, on-chip bandpass filters and on-chip antennas for sub-terahertz band applications.

[1]  A. Barakat,et al.  A W-Band Compact Substrate Integrated Waveguide Bandpass Filter With Defected Ground Structure in CMOS Technology , 2022, IEEE Transactions on Circuits and Systems II: Express Briefs.

[2]  A. Barakat,et al.  A W-Band 0.01 mm2 Cavity Resonator Employing Slot-Loaded Shielded Folded Ridged Quarter-Mode in CMOS Technology , 2022, IEEE Microwave and Wireless Components Letters.

[3]  K. Yoshitomi,et al.  X-Band Feedback Type Miniaturized Oscillator Design With Low Phase Noise Based on Eighth Mode SIW Bandpass Filter , 2021, IEEE Microwave and Wireless Components Letters.

[4]  K. Yoshitomi,et al.  Miniaturized Slot-Loaded SIW Resonator and Its Application to C-band Low Phase Noise Oscillator , 2021, 2020 50th European Microwave Conference (EuMC).

[5]  Thomas R. Jones,et al.  Miniaturized Folded Ridged Half-Mode and Quarter-Mode Substrate Integrated Waveguides for Filter Design , 2019, IEEE Transactions on Microwave Theory and Techniques.

[6]  Ramesh K. Pokharel,et al.  Ultracompact CMOS 60-GHz Tapped-Line Combline BPF With Two Transmission Zeros Using Defected Ground Structures , 2018, IEEE Transactions on Components, Packaging and Manufacturing Technology.

[7]  Gordon W. Roberts,et al.  A mmWave Folded Substrate Integrated Waveguide in a 130-nm CMOS Process , 2017, IEEE Transactions on Microwave Theory and Techniques.

[8]  David E. Senior,et al.  A surface micromachined broadband millimeter-wave filter using quarter-mode substrate integrated waveguide loaded with complementary split ring resonator , 2014, 2014 IEEE MTT-S International Microwave Symposium (IMS2014).

[9]  M. Fujishima,et al.  On the length of THRU standard for TRL de-embedding on Si substrate above 110 GHz , 2013, 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS).

[10]  Keiji Yoshida,et al.  60GHz-band low loss on-chip band pass filter with patterned ground shields for millimeter wave CMOS SoC , 2011, 2011 IEEE MTT-S International Microwave Symposium.

[11]  Tao Yang,et al.  Substrate Integrated Waveguide Loaded by Complementary Split-Ring Resonators and Its Applications to Miniaturized Waveguide Filters , 2009, IEEE Transactions on Microwave Theory and Techniques.

[12]  Thomas R. Jones,et al.  Miniaturized Folded Ridged Quarter-Mode Substrate Integrated Waveguide RF MEMS Tunable Bandpass Filter , 2020, IEEE Access.