论文信息 - Deep Level Defects in He-implanted n-6H-SiC Studied by Deep Level Transient Spectroscopy - 字舞流文

Deep Level Defects in He-implanted n-6H-SiC Studied by Deep Level Transient Spectroscopy

W. Skorupa | G. Brauer | W. Anwand | C. Ling | C. Beling | S. Fung | Huasheng Wu | X. Chen