Separation of effects of oxide-trapped charge and interface-trapped charge on mobility in irradiated power MOSFETs

An effective approach to separating the effects of oxide-trapped charge and interface-trapped charge on mobility degradation in irradiated MOSFETs is demonstrated. It is based on analyzing mobility data sets that have different functional relationships between the radiation-induced-oxide-trapped charge and interface-trapped charge. Separation of the effects of these two trapped charge components is only possible if they are not linearly dependent. A significant contribution of oxide-trapped charge to mobility degradation is demonstrated and quantified. >

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