Wavefront measurement by phase retrieval through single defocus intensity patterns

An algorithm for wavefront measurement using a phase retrieval method is proposed. Only one defocus intensity pattern of the imaging optical system is needed for phase retrieval. Based on the extended Nijboer-Zernike (ENZ) approach, this algorithm draws on general inverse matrix theory, and a predictor-corrector method is also used to correct the linearization errors for medium-to-large aberrations. This method does not need multi-defocus intensity in the focal region, and it can exclude vibration during multi-intensity pattern capturing, making the whole process simple and brief. Some simulated results are presented which show this algorithm has good convergence against noise. A confirmatory experiment is carried out, and its results verifying this method are also given. 2013 Astro Ltd.

[1]  A. Janssen Extended Nijboer-Zernike approach for the computation of optical point-spread functions. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.

[2]  I Iglesias Parametric Wave-Aberration Retrieval from Point-Spread Function Data by use of a Pyramidal Recursive Algorithm. , 1998, Applied optics.

[3]  Thomas Sure,et al.  Reconstructing the pupil function of microscope objectives from the intensity PSF , 2002, SPIE Optics + Photonics.

[4]  Joseph J. M. Braat,et al.  Aberration retrieval using the extended Nijboer-Zernike approach , 2003 .

[5]  James R. Fienup,et al.  Phase retrieval for undersampled broadband images , 1999 .

[6]  Peter Dirksen,et al.  Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions. , 2002, Journal of the Optical Society of America. A, Optics, image science, and vision.

[7]  Jari Lindberg,et al.  Mathematical concepts of optical superresolution , 2012 .

[8]  J. J. M. Braat,et al.  Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer–Zernike approach , 2005 .

[9]  J R Fienup,et al.  Phase retrieval algorithms: a comparison. , 1982, Applied optics.

[10]  J R Fienup,et al.  Reconstruction of an object from the modulus of its Fourier transform. , 1978, Optics letters.

[11]  MA Dong-mei Test and evaluation of wavefront phase of point diffraction , 2010 .

[12]  Peter De Bisschop,et al.  Characterization of a projection lens using the extended Nijboer-Zernike approach , 2002, SPIE Advanced Lithography.

[13]  John W Sedat,et al.  Phase retrieval for high-numerical-aperture optical systems. , 2003, Optics letters.