Design of the electrostatic linear microactuator based on the inchworm motion

Abstract A novel structure of a linear microactuator of which the moving principle is based on the motion of an inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate a force of a few mN and a moving speed of 13 cm min −1 under conditions of 100V and a frequency of 1.4 kHz.