Low-Temperature Atomic Layer Deposition of MoS2 Films.

Wet chemical screening reveals the very high reactivity of Mo(NMe2 )4 with H2 S for the low-temperature synthesis of MoS2 . This observation motivated an investigation of Mo(NMe2 )4 as a volatile precursor for the atomic layer deposition (ALD) of MoS2 thin films. Herein we report that Mo(NMe2 )4 enables MoS2 film growth at record low temperatures-as low as 60 °C. The as-deposited films are amorphous but can be readily crystallized by annealing. Importantly, the low ALD growth temperature is compatible with photolithographic and lift-off patterning for the straightforward fabrication of diverse device structures.

[1]  D. Rouchon,et al.  A novel 2-step ALD route to ultra-thin MoS2 films on SiO2 through a surface organometallic intermediate. , 2017, Nanoscale.

[2]  M. Hersam,et al.  Mixed-dimensional van der Waals heterostructures. , 2016, Nature materials.

[3]  Hua Zhang,et al.  Solution-Processed Two-Dimensional MoS2 Nanosheets: Preparation, Hybridization, and Applications. , 2016, Angewandte Chemie.

[4]  Xiao Zhang,et al.  Lösungsprozessierte MoS2-Nanoplättchen: Herstellung, Hybridisierung und Anwendungen , 2016 .

[5]  H. Meng,et al.  Efficient Charge Injection in Organic Field‐Effect Transistors Enabled by Low‐Temperature Atomic Layer Deposition of Ultrathin VOx Interlayer , 2016 .

[6]  Yifan Sun,et al.  Controlled Exfoliation of MoS2 Crystals into Trilayer Nanosheets. , 2016, Journal of the American Chemical Society.

[7]  S. Barry,et al.  Principles of precursor design for vapour deposition methods , 2016 .

[8]  Zhenyu Jin,et al.  A comprehensive study on atomic layer deposition of molybdenum sulfide for electrochemical hydrogen evolution. , 2016, Nanoscale.

[9]  Bo Chen,et al.  2D Transition‐Metal‐Dichalcogenide‐Nanosheet‐Based Composites for Photocatalytic and Electrocatalytic Hydrogen Evolution Reactions , 2016, Advanced materials.

[10]  J. Eom,et al.  Synthesis and characterization of large-area and continuous MoS2 atomic layers by RF magnetron sputtering. , 2016, Nanoscale.

[11]  J. F. Conley,et al.  Atomic layer deposition of two dimensional MoS2 on 150 mm substrates , 2016 .

[12]  Jian Zhen Ou,et al.  Biosensors Based on Two-Dimensional MoS2 , 2016 .

[13]  C. Hess,et al.  Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition. , 2015, Angewandte Chemie.

[14]  C. Hess,et al.  Nanoskalige Oberflächenstrukturierung mittels Atomlagenabscheidung , 2015 .

[15]  Zhitang Song,et al.  Synthesis of Large-Area Highly Crystalline Monolayer Molybdenum Disulfide with Tunable Grain Size in a H2 Atmosphere. , 2015, ACS applied materials & interfaces.

[16]  Hua Zhang.  Ultrathin Two-Dimensional Nanomaterials. , 2015, ACS nano.

[17]  Pinshane Y. Huang,et al.  High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity , 2015, Nature.

[18]  Hua Zhang,et al.  Two-dimensional transition metal dichalcogenide nanosheet-based composites. , 2015, Chemical Society reviews.

[19]  Yu Chen,et al.  Two-dimensional graphene analogues for biomedical applications. , 2015, Chemical Society reviews.

[20]  Gautam Gupta,et al.  Chemical Vapor Deposition Synthesized Atomically Thin Molybdenum Disulfide with Optoelectronic-Grade Crystalline Quality. , 2015, ACS nano.

[21]  C. Rao,et al.  Comparative Study of Potential Applications of Graphene, MoS2, and Other Two-Dimensional Materials in Energy Devices, Sensors, and Related Areas. , 2015, ACS applied materials & interfaces.

[22]  H. Choi,et al.  Synthesis and properties of molybdenum disulphide: from bulk to atomic layers , 2015 .

[23]  Andras Kis,et al.  Thickness-dependent mobility in two-dimensional MoS₂ transistors. , 2015, Nanoscale.

[24]  Jian Qin,et al.  2D Space-Confined Synthesis of Few-Layer MoS2 Anchored on Carbon Nanosheet for Lithium-Ion Battery Anode. , 2015, ACS nano.

[25]  Qing Hua Wang,et al.  Layer number dependence of MoS2 photoconductivity using photocurrent spectral atomic force microscopic imaging. , 2015, ACS nano.

[26]  D. Tweet,et al.  Atomic layer deposition of MoS2 thin films , 2015 .

[27]  N. Dasgupta,et al.  Atomic layer deposition of metal sulfide materials. , 2015, Accounts of chemical research.

[28]  Zhenyu Jin,et al.  High turnover frequency of hydrogen evolution reaction on amorphous MoS2 thin film directly grown by atomic layer deposition. , 2015, Langmuir : the ACS journal of surfaces and colloids.

[29]  S. Mitra,et al.  Atomic Layer Deposited MoS2 as a Carbon and Binder Free Anode in Li- ion Battery , 2014 .

[30]  Zhenyu Jin,et al.  Novel chemical route for atomic layer deposition of MoS₂ thin film on SiO₂/Si substrate. , 2014, Nanoscale.

[31]  Y. Leblebici,et al.  MoS2 transistors operating at gigahertz frequencies. , 2014, Nano letters.

[32]  Lei Liao,et al.  Interface Engineering for High‐Performance Top‐Gated MoS2 Field‐Effect Transistors , 2014, Advanced materials.

[33]  H. Tan,et al.  Atomic layer deposition of a MoS₂ film. , 2014, Nanoscale.

[34]  R. Arita,et al.  Valley-dependent spin polarization in bulk MoS2 with broken inversion symmetry. , 2014, Nature nanotechnology.

[35]  Z. Yin,et al.  Preparation and applications of mechanically exfoliated single-layer and multilayer MoS₂ and WSe₂ nanosheets. , 2014, Accounts of chemical research.

[36]  L. Lauhon,et al.  Emerging device applications for semiconducting two-dimensional transition metal dichalcogenides. , 2014, ACS nano.

[37]  C. Rao,et al.  Graphene analogues of inorganic layered materials. , 2013, Angewandte Chemie.

[38]  C. Rao,et al.  Graphen‐analoge anorganische Schichtmaterialien , 2013 .

[39]  G. Duesberg,et al.  High‐Performance Sensors Based on Molybdenum Disulfide Thin Films , 2013, Advanced materials.

[40]  D. Meyer,et al.  Atomic layer deposition of TiO2 from tetrakis(dimethylamino)titanium and H2O , 2013 .

[41]  Wenhui Shi,et al.  Preparation of MoS2-coated three-dimensional graphene networks for high-performance anode material in lithium-ion batteries. , 2013, Small.

[42]  Jian Zhen Ou,et al.  Two‐Dimensional Molybdenum Trioxide and Dichalcogenides , 2013 .

[43]  Fei Meng,et al.  Enhanced hydrogen evolution catalysis from chemically exfoliated metallic MoS2 nanosheets. , 2013, Journal of the American Chemical Society.

[44]  A. Radenović,et al.  Ultrasensitive photodetectors based on monolayer MoS2. , 2013, Nature nanotechnology.

[45]  Chunhai Fan,et al.  Single-layer MoS2-based nanoprobes for homogeneous detection of biomolecules. , 2013, Journal of the American Chemical Society.

[46]  Hua Zhang,et al.  The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets. , 2013, Nature chemistry.

[47]  Yi‐Ming Yan,et al.  Synthesis of MoS2 and MoO2 for their applications in H2 generation and lithium ion batteries: a review , 2013, Science and technology of advanced materials.

[48]  Zhiyuan Zeng,et al.  Metal dichalcogenide nanosheets: preparation, properties and applications. , 2013, Chemical Society reviews.

[49]  Jun Lou,et al.  Vapour phase growth and grain boundary structure of molybdenum disulphide atomic layers. , 2013, Nature materials.

[50]  Qiyuan He,et al.  Fabrication of flexible MoS2 thin-film transistor arrays for practical gas-sensing applications. , 2012, Small.

[51]  Aaron M. Jones,et al.  Electrical tuning of valley magnetic moment through symmetry control in bilayer MoS2 , 2012, Nature Physics.

[52]  Lain‐Jong Li,et al.  Synthesis of Large‐Area MoS2 Atomic Layers with Chemical Vapor Deposition , 2012, Advanced materials.

[53]  Yu‐Chuan Lin,et al.  Growth of large-area and highly crystalline MoS2 thin layers on insulating substrates. , 2012, Nano letters.

[54]  Z. Yin,et al.  Single-layer MoS2 phototransistors. , 2012, ACS nano.

[55]  Hua Zhang,et al.  Fabrication of single- and multilayer MoS2 film-based field-effect transistors for sensing NO at room temperature. , 2012, Small.

[56]  Zhiyuan Zeng,et al.  Single-layer semiconducting nanosheets: high-yield preparation and device fabrication. , 2011, Angewandte Chemie.

[57]  C. Lamberti,et al.  Model oxide supported MoS2 HDS catalysts: structure and surface properties , 2011 .

[58]  A. Radenović,et al.  Single-layer MoS2 transistors. , 2011, Nature nanotechnology.

[59]  J. Shan,et al.  Atomically thin MoS₂: a new direct-gap semiconductor. , 2010, Physical review letters.

[60]  A. Splendiani,et al.  Emerging photoluminescence in monolayer MoS2. , 2010, Nano letters.

[61]  W. Maeng,et al.  Thermal and plasma-enhanced ALD of Ta and Ti oxide thin films from alkylamide precursors , 2006 .

[62]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[63]  Q. Li,et al.  Polycrystalline Molybdenum Disulfide (2H−MoS2) Nano- and Microribbons by Electrochemical/Chemical Synthesis , 2004 .

[64]  Esther Kim,et al.  Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors , 2002 .

[65]  Weichao Yu,et al.  Hydrothermal Synthesis and Characterization of Single-Molecular-Layer MoS2 and MoSe2 , 2001 .

[66]  C. Wiemer,et al.  Valence band photoemission study of the Ti?Mo?N system , 1996 .

[67]  R. Gordon,et al.  Low-temperature atmospheric-pressure metal−organic chemical vapor deposition of molybdenum nitride thin films , 1996 .

[68]  L. Thompson,et al.  XPS study of as-prepared and reduced molybdenum oxides , 1996 .

[69]  J. Niemantsverdriet,et al.  Sulfidation study of molybdenum oxide using MoO3/SiO2/Si(100) model catalysts and Mo3IV-sulfur cluster compounds , 1995 .

[70]  B. Strohmeier.  Characterization of an Activated Alumina Claus Catalyst by XPS , 1994 .

[71]  N. H. Turner,et al.  Determination of peak positions and areas from wide‐scan XPS spectra , 1990 .

[72]  Z. Paâl,et al.  Activation of unsupported CoMo catalysts in thiophene hydrodesulfurization , 1989 .

[73]  J. Bart,et al.  A spectroscopic investigation of cerium molybdenum oxides , 1983 .

[74]  G. Ertl,et al.  XPS study of copper aluminate catalysts , 1980 .

[75]  D. Hercules,et al.  A surface study of cobalt-molybdena-alumina catalysts using x-ray photoelectron spectroscopy , 1976 .

[76]  Xiao Zhang,et al.  Two-dimensional transition metal dichalcogenide nanomaterials for biosensing applications , 2017 .

[77]  S. George.  Atomic layer deposition: an overview. , 2010, Chemical reviews.

[78]  F. Besenbacher,et al.  Size-dependent structure of MoS2 nanocrystals. , 2007, Nature nanotechnology.

[79]  D. Lichtman,et al.  A qualitative and quantitative study of the oxides of aluminum and silicon using AES and XPS , 1985 .

[80]  C. Rao,et al.  XPES studies of oxides of second- and third-row transition metals including rare earths , 1980 .