论文信息 - Fabrication of InGaN/GaN nanodisk structure by using bio-template and neutral beam etching process - 字舞流文

Fabrication of InGaN/GaN nanodisk structure by using bio-template and neutral beam etching process

I. Yamashita | A. Higo | S. Samukawa | S. Kuboya | A. Murayama | T. Tanikawa | R. Katayama | Y. Lai | Yu Peichen | T. Kiba | K. Shojiki | C. Lee | C. Thomas