论文信息 - WO3 thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine

WO3 thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine

Abstract Tungsten oxide (WO3) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol–gel technique with WCl6 as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500°C. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found.

[1] Giorgio Sberveglieri,et al. Reactively sputtered indium tin oxide polycrystalline thin films as NO and NO2 gas sensors , 1990 .

[2] S. Manorama,et al. Hydrogen sulfide sensor based on tin oxide deposited by spray pyrolysis and microwave plasma chemical vapor deposition , 1994 .

[3] M. Faccio,et al. NO2 gas sensitivity of sol-gel derived α-Fe2O3 thin films , 1995 .

[4] C. Liu,et al. Properties and mechanism study of Ag doped SnO2 thin films as H2S sensors , 1997 .