Dimensionelle Metrologie an ebenen Substraten mit Mikro- und NanostrukturenDimensional Metrology on Plane Substrates with Micro- and Nanostructures

Zusammenfassung Der Beitrag stellt die messtechnischen Anforderungen vor zur präzisen Charakterisierung von mikro- und nanostrukturierten ebenen Substraten wie Strichmaßstäben, inkrementellen Encodern oder Masken hinsichtlich dimensioneller Messgrößen wie Positionen, Abstände, Koordinaten und Breiten von Strukturen sowie die hierzu in der PTB entwickelten Referenzverfahren und -messgeräte.

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