Acoustofluidic actuation of in situ fabricated microrotors.

We have demonstrated in situ fabricated and acoustically actuated microrotors. A polymeric microrotor with predefined oscillating sharp-edge structures is fabricated in situ by applying a patterned UV light to polymerize a photocrosslinkable polyethylene glycol solution inside a microchannel around a polydimethylsiloxane axle. To actuate the microrotors by oscillating the sharp-edge structures, we employed piezoelectric transducers which generate tunable acoustic waves. The resulting acoustic streaming flows rotate the microrotors. The rotation rate is tuned by controlling the peak-to-peak voltage applied to the transducer. A 6-arm microrotor can exceed 1200 revolutions per minute. Our technique is an integration of single-step microfabrication, instant assembly around the axle, and easy acoustic actuation for various applications in microfluidics and microelectromechanical systems (MEMS).

[1]  S. Tsai,et al.  Rotary polymer micromachines: in situ fabrication of microgear components in microchannels , 2015 .

[2]  Kee Suk Ryu,et al.  A magnetic microstirrer and array for microfluidic mixing , 2002 .

[3]  Toshio Fukuda,et al.  Improved Laser Manipulation for On-chip Fabricated Microstructures Based on Solution Replacement and Its Application in Single Cell Analysis , 2014 .

[4]  Yuichi Hiratsuka,et al.  A microrotary motor powered by bacteria , 2006, Proceedings of the National Academy of Sciences.

[5]  Chang Liu,et al.  Micro magnetic stir-bar mixer integrated with parylene microfluidic channels. , 2004, Lab on a chip.

[6]  Stephanus Büttgenbach,et al.  Micro gear pump with internal electromagnetic drive , 2010 .

[7]  Yuliang Xie,et al.  An Acoustofluidic Micromixer via Bubble Inception and Cavitation from Microchannel Sidewalls , 2014, Analytical chemistry.

[8]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[9]  David Sinton,et al.  Two-dimensional slither swimming of sperm within a micrometre of a surface , 2015, Nature Communications.

[10]  Christian Decker,et al.  Kinetic approach of oxygen inhibition in ultraviolet- and laser-induced polymerizations , 1985 .

[11]  Alexander Kuhn,et al.  Electric field-induced chemical locomotion of conducting objects. , 2011, Nature communications.

[12]  V. Crespi,et al.  A general flux-based analysis for spherical electrocatalytic nanomotors , 2015 .

[13]  J. Kozinski,et al.  Functional polymer sheet patterning using microfluidics. , 2014, Langmuir : the ACS journal of surfaces and colloids.

[14]  Peng Li,et al.  Surface acoustic wave microfluidics. , 2013, Lab on a chip.

[15]  José Antonio Cruz-Ledesma,et al.  Modelling, Design and Robust Control of a Remotely Operated Underwater Vehicle , 2014 .

[16]  R Di Leonardo,et al.  Bacterial ratchet motors , 2009, Proceedings of the National Academy of Sciences.

[17]  Howon Lee,et al.  SUPPLEMENTARY INFORMATION Structural colour printing using a magnetically tunable and lithographically fixable photonic crystal , 2009 .

[18]  Yury Gogotsi,et al.  Multifunctional magnetic rotator for micro and nanorheological studies. , 2012, The Review of scientific instruments.

[19]  Tony Jun Huang,et al.  An acoustofluidic micromixer based on oscillating sidewall sharp-edges. , 2013, Lab on a chip.

[20]  Francesco Costanzo,et al.  Investigation of micromixing by acoustically oscillated sharp-edges. , 2016, Biomicrofluidics.

[21]  Yuliang Xie,et al.  Single-shot characterization of enzymatic reaction constants Km and kcat by an acoustic-driven, bubble-based fast micromixer. , 2012, Analytical chemistry.

[22]  Yongdae Kim,et al.  A novel micro-mixer with a quasi-active rotor: fabrication and design improvement , 2009 .

[23]  Wook Park,et al.  Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels , 2007 .

[24]  T. Huang,et al.  Selectively manipulable acoustic-powered microswimmers , 2015, Scientific Reports.

[25]  J. Vanneste,et al.  Streaming by leaky surface acoustic waves , 2011, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[26]  Chad A Mirkin,et al.  Methods for fabricating microarrays of motile bacteria. , 2005, Small.

[27]  Yong-Joe Kim,et al.  Microfluidic acoustophoretic force based low-concentration oil separation and detection from the environment. , 2014, Lab on a chip.

[28]  Ali Khademhosseini,et al.  Stop-flow lithography to generate cell-laden microgel particles. , 2008, Lab on a chip.

[29]  R. Kessin,et al.  Light-Directed Migration of D. discoideum Slugs in Microfabricated Confinements. , 2012, Sensors and actuators. A, Physical.

[30]  T. Huang,et al.  Acousto-plasmofluidics: Acoustic modulation of surface plasmon resonance in microfluidic systems. , 2015, AIP advances.

[31]  D. Sinton,et al.  Microfluidic assessment of swimming media for motility-based sperm selection. , 2015, Biomicrofluidics.

[32]  Daniel Ahmed,et al.  Rotational manipulation of single cells and organisms using acoustic waves , 2016, Nature Communications.

[33]  James Friend,et al.  Rotational microfluidic motor for on-chip microcentrifugation , 2011 .

[34]  Mohamed Gad-el-Hak,et al.  A Novel Pump for MEMS Applications , 1996 .

[35]  T. Huang,et al.  A spatiotemporally controllable chemical gradient generator via acoustically oscillating sharp-edge structures. , 2015, Lab on a chip.

[36]  Robert Langer,et al.  A BioMEMS review: MEMS technology for physiologically integrated devices , 2004, Proceedings of the IEEE.

[37]  Sriram Ramaswamy,et al.  Rheology of active-particle suspensions. , 2003, Physical review letters.

[38]  A. Manz,et al.  Acoustofluidic Chemical Waveform Generator and Switch , 2014, Analytical chemistry.

[39]  Sunghoon Kwon,et al.  In Situ Fabrication and Actuation of Polymer Magnetic Microstructures , 2011, Journal of Microelectromechanical Systems.

[40]  Lin Wang,et al.  A reliable and programmable acoustofluidic pump powered by oscillating sharp-edge structures. , 2014, Lab on a chip.

[41]  Francesco Costanzo,et al.  Numerical study of acoustophoretic motion of particles in a PDMS microchannel driven by surface acoustic waves. , 2015, Lab on a chip.

[42]  T. Alan Hatton,et al.  Modeling of Oxygen-Inhibited Free Radical Photopolymerization in a PDMS Microfluidic Device , 2008 .

[43]  I. Aranson,et al.  Swimming bacteria power microscopic gears , 2009, Proceedings of the National Academy of Sciences.

[44]  David Erickson,et al.  Electrokinetic microfluidic devices for rapid, low power drug delivery in autonomous microsystems. , 2008, Lab on a chip.

[45]  Francesco Costanzo,et al.  Investigation of acoustic streaming patterns around oscillating sharp edges. , 2014, Lab on a chip.

[46]  Matthew R Moore,et al.  A metering rotary nanopump for microfluidic systems. , 2010, Lab on a chip.

[47]  Mehmet Toner,et al.  Magnetically and biologically active bead-patterned hydrogels. , 2006, Langmuir : the ACS journal of surfaces and colloids.