论文信息 - Multiphoton laser lithography for the fabrication of plasmonic components

Multiphoton laser lithography for the fabrication of plasmonic components

In this contribution, we demonstrate multi-photon femtosecond laser lithography for the fabrication and rapid prototyping of plasmonic components. Using this technology different dielectric and metallic SPP-structures can be fabricated in a low-cost and time-efficient way. Resolution limits of this technology will be discussed. Investigations of the optical properties of the fabricated SPP-structures by far-field leakage radiation microscopy will be reported.

Boris N. Chichkov | Carsten Reinhardt | Sven Passinger | Roman Kiyan | Jürgen Koch

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