论文信息 - In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3 - 字舞流文

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3

Sbs Stephan Heil | W. Kessels | Van de Sanden | E. Langereis | P. Kudlacek | R. Engeln | S. S. Heil