In succession of a benchmark study for the modeling of micro-optical components in the Network of Excellence on Micro-Optics (NEMO) we define a novel systematic approach for the evaluation of modeling results and the combination of different modeling approaches and modeling expertise. The method is applied for an optical bridge system, comprising both refractive and diffractive optical components. We work with different intermediate planes at which the field distributions obtained with different simulation tools are rigorously compared. Therefore all participating partners have programmed the necessary tools that allow the exchange of obtained field distributions. First evaluation results are discussed in detail.