State engine based validation of MEMS process sequences

The validation of process sequences could use the process expert knowledge of specific MEMS pipeline to reason out whether the user-defined process sequences can be manufactured on this pipeline. The process, its parameters and the order of process sequences have great impact on the result of the MEMS device manufactured, even result in that the user-defined process sequences can't be manufactured on specific MEMS pipeline. In this paper we put forward the validation of process sequences based on the state engine. Firstly, obtaining the process knowledge, then, generating the states of every process by the state engine, at last, reasoning out the validation result of the process sequences by using the matrix of the process states and the expert knowledge.