Stiffness analysis of a compliant precision positioning stage

In this paper a 3-degree of freedom compliant parallel positioning stage utilizing flexure hinges is explored for nanoimprint lithography. The performance of the stage is extensively analyzed using a pseudo-rigid body model and finite element method. The position and velocity models are established. Accordingly, the stiffness at driving point of the active arm is obtained on the basis of Castigliano's first theorem. The system stiffness of the compliant stage is explored using the compliant matrix methodology and matrix transformation, and the influence of the geometry parameters on stiffness factors in three directions has been graphically evaluated as well. Finite element analysis has been conducted to verify that the established models faithfully predict device performance.

[1]  Stefan Staicu.  Dynamics of the spherical 3- $\mathit{U\underline{P}S/}S$ parallel mechanism with prismatic actuators , 2009 .

[2]  Lining Sun,et al.  Design of a precision compliant parallel positioner driven by dual piezoelectric actuators , 2007 .

[3]  Yucheng Ding,et al.  Review of the wafer stage for nanoimprint lithography , 2007 .

[4]  Stefan Staicu.  Recursive modelling in dynamics of Delta parallel robot , 2009, Robotica.

[5]  GU Wen-qi.  Design of Bellows Cylinder Type UV Nanoimprint Lithography System , 2007 .

[6]  B. Shirinzadeh,et al.  Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation , 2010 .

[7]  Yangmin Li,et al.  Design of a partially decoupled high precision XYZ compliant parallel micromanipulator , 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[8]  Reymond Clavel,et al.  Orion MinAngle: A flexure-based, double-tilting parallel kinematics for ultra-high precision applications requiring high angles of rotation , 2005 .

[9]  Qingsong Xu,et al.  Design, Fabrication, and Visual Servo Control of an XY Parallel Micromanipulator With Piezo-Actuation , 2009, IEEE Transactions on Automation Science and Engineering.

[10]  N. Lobontiu,et al.  Stiffness characterization of corner-filleted flexure hinges , 2004 .

[11]  Qingsong Xu,et al.  Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator , 2009, IEEE Transactions on Robotics.

[12]  Maan M. Alkaisi,et al.  Multilevel nanoimprint lithography , 2004 .

[13]  I-Ming Chen,et al.  Stiffness modeling of flexure parallel mechanism , 2005 .

[14]  Hwa Soo Kim,et al.  Design and modeling of a novel 3-DOF precision micro-stage , 2009 .

[15]  Yanling Tian,et al.  A flexure-based mechanism and control methodology for ultra-precision turning operation , 2009 .

[16]  Kee-Bong Choi,et al.  The UV-Nanoimprint Lithography with Multi-head Nanoimprinting Unit for Sub-50nm Half-pitch Patterns , 2006, 2006 SICE-ICASE International Joint Conference.

[17]  N. Reng,et al.  Step and flash nanoimprint lithography in Europe , 2004, 4th IEEE Conference on Nanotechnology, 2004..

[18]  Jingjun Yu,et al.  ANALYSIS FOR THE STATIC STIFFNESS OF A 3DOF PARALLEL COMPLIANT MICROMANIPULATOR , 2002 .

[19]  S. Staicu,et al.  A novel dynamic modelling approach for parallel mechanisms analysis , 2008 .

[20]  Yanling Tian,et al.  Investigation of a 3-DOF micro-positioning table for surface grinding , 2006 .

[21]  Gursel Alici,et al.  Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation , 2009 .

[22]  Qingsong Xu,et al.  Stiffness Modeling for an Orthogonal 3-PUU Compliant Parallel Micromanipulator , 2006, 2006 International Conference on Mechatronics and Automation.

[23]  Qingsong Xu,et al.  Modeling and performance evaluation of a flexure-based XY parallel micromanipulator , 2009 .

[24]  Zhijiang Du,et al.  Stiffness research on a high-precision, large-workspace parallel mechanism with compliant joints , 2008 .

[25]  J. M. Paros,et al.  Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .

[26]  Lining Sun,et al.  A Novel Piezo-driven Nanopositioning Mechanism for Precise Manipulating , 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[27]  Stephen Y. Chou,et al.  Imprint lithography with sub-10 nm feature size and high throughput , 1997 .

[28]  Tien-Fu Lu,et al.  Multiple-degree-of-freedom compliant mechanism possessing nearly uncoupled dynamics: experimental findings , 2002, SPIE Micro + Nano Materials, Devices, and Applications.

[29]  Qingsong Xu,et al.  Design modification of a 3-PRC compliant parallel micromanipulator for micro/nano scale manipulation , 2007, 2007 7th IEEE Conference on Nanotechnology (IEEE NANO).

[30]  Carl D. Crane,et al.  Stiffness mapping of planar compliant parallel mechanisms in a serial arrangement , 2006, ARK.

[31]  David Zhang,et al.  Three flexure hinges for compliant mechanism designs based on dimensionless graph analysis , 2010 .

[32]  Bijan Shirinzadeh,et al.  Stiffness estimation of the flexure-based five-bar micro-manipulator , 2008, 2008 10th International Conference on Control, Automation, Robotics and Vision.

[33]  Tatsuo Arai,et al.  Kinematic analysis of translational 3-DOF micro parallel mechanism using matrix method , 2000, Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113).

[34]  Yanling Tian,et al.  Design and forward kinematics of the compliant micro-manipulator with lever mechanisms , 2009 .

[35]  Lining Sun,et al.  STIFFNESS ANALYSIS ON A WIDE-RANGE FLEXURE HINGE-BASED PARALLEL MANIPULATOR , 2005 .

[36]  Stuart T. Smith,et al.  ELLIPTICAL FLEXURE HINGES , 1997 .

[37]  Nicolae Lobontiu,et al.  Corner-Filleted Flexure Hinges , 2001 .

[38]  Lung-Wen Tsai,et al.  A Parallel Manipulator with Only Translational Degrees of Freedom , 1997 .

[39]  L. Jay Guo,et al.  Recent progress in nanoimprint technology and its applications , 2004 .

[40]  Matthew E. Colburn,et al.  Design of orientation stages for step and flash imprint lithography , 2001 .

[41]  Qingsong Xu,et al.  A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation , 2006, IEEE Trans Autom. Sci. Eng..

[42]  Kee-Bong Choi,et al.  Design and analysis of the single-step nanoimprinting lithography equipment for sub-100 nm linewidth , 2006 .

[43]  J. Paros.  How to design flexure hinges , 1965 .

[44]  Stefan Staicu,et al.  Inverse dynamics of the 3-PRR planar parallel robot , 2009, Robotics Auton. Syst..

[45]  Du Sheng-chao.  Establishing stiffness of prismatic pair in fully compliant parallel micro-robot using energy method , 2005 .

[46]  Bijan Shirinzadeh,et al.  Performance evaluation of a flexure-based five-bar mechanism for micro/nano manipulation , 2009, 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[47]  Qingsong Xu,et al.  Kinematic Design of a Novel 3-DOF Compliant Parallel Manipulator for Nanomanipulation , 2005, AIM 2005.