Electrochemical buckling microfabrication† †Electronic supplementary information (ESI) available: Detailed fundamentals of CELT, ECBM experiments, FEM simulation and PL image. See DOI: 10.1039/c5sc02644j Click here for additional data file.

Isotropic wet chemical etching can be controlled with a spatial resolution at the nanometer scale, especially for the repetitive microfabrication of hierarchical 3D μ-nanostructures on the continuously curved surface of functional materials.

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