Tactile MEMS-based sensor for delicate microsurgery

This paper presents development of a new MEMS-based tactile microsensor to replicate the delicate sense of touch in robotic surgery. Using an epoxy-based photoresist, SU-8, as substrate, the piezoresistive type sensor is flexible, robust, and easy to fabricate in mass. Sensor characteristic tests indicate adequate sensitivity and linearity, and the multiple sensor elements can match full range of surgical tissue stiffness. Such characteristic nearly match the most delicate sense of touch at the human fingertip. It is expected such a sensor is essential for delicate surgeries, such as handling delicate tissues and microsurgery.

[1]  A. Okamura.  Haptic feedback in robot-assisted minimally invasive surgery , 2009, Current opinion in urology.

[2]  Kotaro Tadano,et al.  Development of 4-DOFs forceps with force sensing using pneumatic servo system , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..

[3]  Robert D. Howe,et al.  Remote palpation technology , 1995 .

[4]  Jaydev P. Desai,et al.  Design, Development, and Testing of an Automated Laparoscopic Grasper with 3-D Force Measurement Capability , 2004, ISMS.

[5]  E. Petter,et al.  Vibrotactile palpation instrument for use in minimal invasive surgery , 1996, Proceedings of 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[6]  S. Sokhanvar,et al.  A multifunctional PVDF-based tactile sensor for minimally invasive surgery , 2007 .

[7]  U. Voges,et al.  Robotics and allied technologies in endoscopic surgery. , 1998, Surgical technology international.

[8]  Yasuhisa Hasegawa,et al.  An active tactile sensor for detecting mechanical characteristics of contacted objects , 2006 .

[9]  T. Kamei,et al.  Novel surface structure and its fabrication process for MEMS fingerprint sensor , 2005, IEEE Transactions on Electron Devices.

[10]  Kenneth G. Sharp,et al.  Star alkoxysilane molecules, gels and appreciably tough glasses , 2005 .

[11]  J. R. Hewit,et al.  Tactile sensing technology for minimal access surgery––a review , 2003 .

[12]  V. Maheshwari,et al.  Tactile devices to sense touch on a par with a human finger. , 2008, Angewandte Chemie.

[13]  Bernhard Kübler,et al.  Prototype of Instrument for Minimally Invasive Surgery with 6-Axis Force Sensing Capability , 2005, Proceedings of the 2005 IEEE International Conference on Robotics and Automation.

[14]  Gary K. Fedder,et al.  Endoscopic optical coherence tomography with a micromachined mirror , 2002, 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.02EX578).

[15]  S. Lederman,et al.  Human Hand Function , 2006 .

[16]  S. Goodwin-Johansson,et al.  Intracardiac ultrasound catheter using a micromachine (MEMS) actuator , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[17]  Takao Someya,et al.  A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[18]  L.D. Seneviratne,et al.  State-of-the-Art in Force and Tactile Sensing for Minimally Invasive Surgery , 2008, IEEE Sensors Journal.

[19]  Dong-Chul Han,et al.  Intravascular micro active catheter for minimal invasive surgery , 2000, 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451).

[20]  M. Mack,et al.  Minimally invasive and robotic surgery. , 2001, JAMA.