A Thermoelectric Infrared Radiation Sensor With Monolithically Integrated Amplifier Stage And Temperature Sensor

We report on a monolithic integrated infrared sensor system consisting of a thermopile, a sensor measuring the chip temperature and an amplifier stage fabricated in a CMOS process on SIMOX (Separation by Nplanted mygen) wafers. A responsivity of 209 V/W and a normalized detectivity D*d 1.3*108 cm-HzlnlW were found for thermopiles with single crystalline p-Sun-Polysilicon thermocouples on silicon oxide/silicon nitride membranes. A first analysis of the thermal influence of the power consumed by the circuitry on the thermopile voltage indicates, that the sensor performance is not deteriorated by the integrated electronic circuitry.