NEMS-based MIM plasmonics tunable filter

Designing a miniaturized and efficient optical filter which can be actively tuned is a modern engineering challenge. This paper propose a design of a device with a nano scale size for active tuning the resonance frequency of a metal-insulator-metal plasmonics optical filter. The design is based on controlling the relative position between two stubs in metal-Insulator-metal plasmonics waveguide using NEMS technology. The mechanical design parameter is chosen carefully to be compatible with modern fabrication technology and a reasonable fabrication process of the device is proposed. The analysis of the mechanical and optical design is done and shows a promising performance. For the chosen mechanical design parameters, the optical resonance wavelength can be tuned from 1.45μm to 1.65μm using 7VDC actuation voltage.