Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si
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E. Simoen | C. Claeys | T. Nakashima | I. Tsunoda | K. Takakura | H. Ohyama | D. Takeuchi | M. Shibuya | Katsuya Murakami | Suguru Funasaki
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