ZnO nanowire-based oxygen gas sensor

We report growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small X-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.

[1]  Xiao Wei Sun,et al.  Hydrothermally grown oriented ZnO nanorod arrays for gas sensing applications , 2006 .

[2]  Shuo-Hung Chang,et al.  Partial-electroded ZnO pyroelectric sensors for responsivity improvement , 2006 .

[3]  S. K. Hazra,et al.  Hydrogen sensitivity of ZnO p-n homojunctions , 2006 .

[4]  Nitin Kumar,et al.  Fabrication of optically enhanced ZnO nanorods and microrods using novel biocatalysts. , 2005, Journal of Nanoscience and Nanotechnology.

[5]  Sang Sub Kim,et al.  An approach to fabricating chemical sensors based on ZnO nanorod arrays , 2008, Nanotechnology.

[6]  S. A. Patil,et al.  Modified zinc oxide thick film resistors as NH3 gas sensor , 2006 .

[7]  H. Kuo,et al.  ZnO nanopowders fabricated by dc thermal plasma synthesis , 2006 .

[8]  Dejun Fu,et al.  The sensitivity of gas sensor based on single ZnO nanowire modulated by helium ion radiation , 2007 .

[9]  D. Basak,et al.  Investigation of a p-CuO/n-ZnO thin film heterojunction for H2 gas-sensor applications , 2006 .

[10]  E. Suh,et al.  Structural and optical properties of single-crystalline ZnO nanorods grown on silicon by thermal evaporation , 2006, Nanotechnology.

[11]  Peidong Yang,et al.  Nanowire ultraviolet photodetectors and optical switches , 2002 .

[12]  Norio Miura,et al.  Development of gas sensors for environmental protection , 1995 .

[13]  Li Zhang,et al.  Rapid synthesis of ZnO nano-rods by one-step, room-temperature, solid-state reaction and their gas-sensing properties , 2006 .

[14]  Tim Schwebel,et al.  A selective, temperature compensated O2 sensor based on Ga2O3 thin films , 2000 .

[15]  Liaoying Zheng,et al.  TiO2−x thin films as oxygen sensor , 2000 .

[16]  Noriya Izu,et al.  Resistive oxygen gas sensors based on CeO2 fine powder prepared using mist pyrolysis , 2002 .

[17]  K. Galatsis,et al.  Gas Sensing Properties of Nanosized Tin Oxide Synthesised by Mechanochemical Processing , 2001 .

[18]  S. Chang,et al.  A novel method for the formation of ladder-like ZnO nanowires , 2006 .

[19]  Carles Cané,et al.  A novel single chip thin film metal oxide array , 2003 .

[20]  B. Tell,et al.  Raman Effect in Zinc Oxide , 1966 .

[21]  Woo Y. Lee,et al.  Template-assisted large-scale ordered arrays of ZnO pillars for optical and piezoelectric applications. , 2006, Small.

[22]  Chien-Tsung Wang,et al.  ZnO nanoparticle-modified infrared internal reflection elements for selective detection of volatile organic compounds. , 2006, Analytical chemistry.

[23]  I-Cherng Chen,et al.  Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles , 2008, Nanotechnology.

[24]  Chung‐Chih Wu,et al.  Scaling behavior of ZnO transparent thin-film transistors , 2006 .

[25]  N. Emanetoglu,et al.  Voltage tunable surface acoustic wave phase shifter using semiconducting/piezoelectric ZnO dual layers grown on r-Al2O3 , 2006 .

[26]  W. Weppner Advanced principles of sensors based on solid state ionics , 1992 .

[27]  Bahri Rezig,et al.  Metrological characteristics of ZNO oxygen sensor at room temperature , 2004 .

[28]  Hailong Lu,et al.  Size Dependence of Gas Sensitivity of ZnO Nanorods , 2007 .

[29]  Shoou-Jinn Chang,et al.  Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption , 2007 .

[30]  S. Chang,et al.  Vertically well aligned P-doped ZnO nanowires synthesized on ZnO-Ga/glass templates. , 2005, Chemical communications.

[31]  Partha Mitra,et al.  ZnO thin film sensor , 1998 .