Oscillators Based on Monolithically Integrated AlN TFBARs

Oscillators based on AlN thin-film bulk acoustic resonators are designed, fabricated and measured. The circuits are realised as silicon-on-silicon multichip modules where SiGe transistors are flip-chip mounted on a novel carrier substrate which includes monolithically integrated resonators and passive components. The paper describes the development and processing of the carrier substrate and resonators, as well as the development of the oscillator circuits.

[1]  Martin Norling,et al.  A 2 GHz oscillator using a monolithically integrated AlN TFBAR , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[2]  K.B. Ostman,et al.  Novel VCO Architecture Using Series Above-IC FBAR and Parallel LC Resonance , 2006, IEEE Journal of Solid-State Circuits.

[3]  J. Rabaey,et al.  A sub-100 /spl mu/W 1.9-GHz CMOS oscillator using FBAR resonator , 2005, 2005 IEEE Radio Frequency integrated Circuits (RFIC) Symposium - Digest of Papers.

[4]  Wei Pang,et al.  Ultra Temperature-Stable Bulk-Acoustic-Wave Resonators with SiO 2 Compensation Layer , 2007, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  S. Gevorgian,et al.  A 2 GHz oscillator based on a solidly mounted thin film bulk acoustic wave resonator , 2006, IEEE MTT-S International Microwave Symposium Digest.

[6]  A. Khanna,et al.  A 2GHz voltage tunable FBAR oscillator , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.

[7]  Hao Zhang,et al.  Temperature-compensated film bulk acoustic resonator above 2 GHz , 2005, IEEE Electron Device Letters.

[8]  P. Bradley,et al.  A Film Bulk Acoustic Resonator (FBAR) L Band Low Noise Oscillator for Digital Communications , 2002, 2002 32nd European Microwave Conference.

[9]  Wei Pang,et al.  5GHz low-phase-noise oscillator based on FBAR with low TCF , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[10]  J. Rabaey,et al.  A 300-μW 1.9-GHz CMOS oscillator utilizing micromachined resonators , 2003, IEEE J. Solid State Circuits.

[11]  R. Plana,et al.  A 5 GHz above-IC FBAR low phase noise balanced oscillator , 2006, IEEE Radio Frequency Integrated Circuits (RFIC) Symposium, 2006.

[12]  J. D. Larson,et al.  Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system , 2000, 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121).

[13]  J.S. Kenney,et al.  A 2.4 GHz VCO with an integrated acoustic solidly mounted resonator , 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).

[14]  B. Rejaei,et al.  Surface-passivated high-resistivity silicon substrates for RFICs , 2004, IEEE Electron Device Letters.

[15]  J. Raskin,et al.  Performance of Coplanar Waveguides on Surface Passivated Highly Resistive Silicon Covered by Ferroelectric Thin Film , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[16]  Wei Pang,et al.  Low phase noise, FBAR-based voltage controlled oscillator without varactor , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[17]  J. Bjurstrom,et al.  Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.