论文信息 - Stimulated Creation of the SOI Structures with Si Nano-Clustersw by Low–Dose SIMOX Technology - 字舞流文

Stimulated Creation of the SOI Structures with Si Nano-Clustersw by Low–Dose SIMOX Technology

V. Litovchenko | V. Melnik | V. Kladko | I. Khatsevich | V. Melnik | V. Popov | O. Oberemok | B. Romanyuk | Vasyl Klad’ko