Deep-Learning Electron Diffractive Imaging.

We report the development of deep-learning coherent electron diffractive imaging at subangstrom resolution using convolutional neural networks (CNNs) trained with only simulated data. We experimentally demonstrate this method by applying the trained CNNs to recover the phase images from electron diffraction patterns of twisted hexagonal boron nitride, monolayer graphene, and a gold nanoparticle with comparable quality to those reconstructed by a conventional ptychographic algorithm. Fourier ring correlation between the CNN and ptychographic images indicates the achievement of a resolution in the range of 0.70 and 0.55 Å. We further develop CNNs to recover the probe function from the experimental data. The ability to replace iterative algorithms with CNNs and perform real-time atomic imaging from coherent diffraction patterns is expected to find applications in the physical and biological sciences.

[1]  S. Louie,et al.  Tuning colour centres at a twisted hexagonal boron nitride interface , 2022, Nature Materials.

[2]  S. Osher,et al.  Three-dimensional atomic packing in amorphous solids with liquid-like structure , 2021, Nature Materials.

[3]  D. Muller,et al.  Electron ptychography achieves atomic-resolution limits set by lattice vibrations , 2021, Science.

[4]  J. Miao,et al.  X-ray linear dichroic ptychography , 2020, Proceedings of the National Academy of Sciences.

[5]  S. Osher,et al.  Determining the three-dimensional atomic structure of an amorphous solid , 2020, Nature.

[6]  M. Humphry,et al.  Contrast transfer and noise considerations in focused-probe electron ptychography. , 2020, Ultramicroscopy.

[7]  Youssef S. G. Nashed,et al.  AI-enabled high-resolution scanning coherent diffraction imaging , 2020 .

[8]  P. Nellist,et al.  Low-dose phase retrieval of biological specimens using cryo-electron ptychography , 2020, Nature Communications.

[9]  J. Miao,et al.  Correlative 3D x-ray fluorescence and ptychographic tomography of frozen-hydrated green algae , 2018, Science Advances.

[10]  Veit Elser,et al.  Electron ptychography of 2D materials to deep sub-ångström resolution , 2018, Nature.

[11]  A. Maiden,et al.  Multi-slice ptychographic tomography , 2018, Scientific Reports.

[12]  Peng Wang,et al.  Electron ptychographic microscopy for three-dimensional imaging , 2017, Nature Communications.

[13]  A. Kirkland,et al.  Electron Ptychographic Diffractive Imaging of Boron Atoms in LaB6 Crystals , 2017, Scientific Reports.

[14]  Henry C. Kapteyn,et al.  Subwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source , 2017, Nature Photonics.

[15]  Gabriel Aeppli,et al.  High-resolution non-destructive three-dimensional imaging of integrated circuits , 2017, Nature.

[16]  J. Miao,et al.  Atomic electron tomography: 3D structures without crystals , 2016, Science.

[17]  Malcolm L. H. Green,et al.  Simultaneous atomic-resolution electron ptychography and Z-contrast imaging of light and heavy elements in complex nanostructures , 2016, Nature Communications.

[18]  J. Miao,et al.  Beyond crystallography: Diffractive imaging using coherent x-ray light sources , 2015, Science.

[19]  Lewys Jones,et al.  Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: experimental demonstration at atomic resolution. , 2015, Ultramicroscopy.

[20]  Jürgen Schmidhuber,et al.  Deep learning in neural networks: An overview , 2014, Neural Networks.

[21]  S. Marchesini,et al.  Chemical composition mapping with nanometre resolution by soft X-ray microscopy , 2014, Nature Photonics.

[22]  J. Miao,et al.  Electron tomography at 2.4-ångström resolution , 2012, Nature.

[23]  J. Rodenburg,et al.  Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging , 2012, Nature Communications.

[24]  O. Bunk,et al.  Ptychographic X-ray computed tomography at the nanoscale , 2010, Nature.

[25]  J. Rodenburg,et al.  An improved ptychographical phase retrieval algorithm for diffractive imaging. , 2009, Ultramicroscopy.

[26]  O. Bunk,et al.  High-Resolution Scanning X-ray Diffraction Microscopy , 2008, Science.

[27]  R. Henderson,et al.  Optimal determination of particle orientation, absolute hand, and contrast loss in single-particle electron cryomicroscopy. , 2003, Journal of molecular biology.

[28]  J. Miao,et al.  Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens , 1999, Nature.

[29]  Earl J. Kirkland,et al.  Advanced Computing in Electron Microscopy , 1998 .