Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
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D. Tsvetanova | N. Horiguchi | J. Ryckaert | S. Biesemans | G. Hellings | I. Ciofi | G. Murdoch | S. Kundu | Y. Sherazi | D. Radisic | V. Vega-Gonzalez | J. Uk-Lee | Y. Drissi | S. Decoster | A. Thiam | B. Chan | F. Seidel | E. Altamirano-Sanchez | A. Peter | G. Martinez | N. Nagesh | D. Tierno | E. Litta | S. Park | Z. Tökei | D. Batuk | H. De Coster | S. Choudhury | A. Sepulveda-Marquez
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