A review of recent work in sub-nanometre displacement measurement using optical and X–ray interferometry

This paper reviews recent work in the field of displacement measurement using optical and X–ray interferometry at the sub–nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra–precise, optical–interferometer–based, displacement measuring transducers presented. The use of X–ray interferometry and its combination with optical interferometry is discussed.

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