Lawrence Berkeley National Laboratory Recent Work

We report the results of our research and development in techniques for producing elliptical x-ray mirrors by controlled bending of a flat substrate. We review the theory and· technique of mirror bending with emphasis on the optical engineering issues and describe our design concepts for both metal and ceramic mirrors. We provide analysis of the various classes of error which have to be addressed in order to obtain a high quality elliptical surface and a correspondingly fine focus of the x-ray beam. We describe particular mirrors which have been built, using these techniques, to meet the requirements of the scientific program at the Advanced Light Source at Berkeley. For these examples we show optical metrology results indicating the achievement of surface accuracy values around and, in some cases, below one microradian as well as x-ray measurements showing submicron focal spots.

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