Quick-turnaround-time improvement for product development and transfer to mass production
暂无分享,去创建一个
F. Matsuoka | Nobuo Hayasaka | Hidetoshi Koike | S. Hohkibara | E. Fukuda | K. Tomioka | Hideshi Miyajima | K. Muraoka | M. Kimura
[1] T. Takeda,et al. Practical scheduling and line optimization technology for ASIC manufacturing lines , 1993 .
[2] S. C. Wood. Cost and cycle time performance of fabs based on integrated single-wafer processing , 1997 .
[3] R. G. Petrakian,et al. Trade-offs in cycle time management: hot lots , 1992 .
[4] Lawrence M. Wein,et al. Scheduling semiconductor wafer fabrication , 1988 .
[5] R. A. Smith,et al. A planner and scheduler for semiconductor manufacturing , 1994 .
[6] A. Koike,et al. Trends in semiconductor device production lines and processing equipment , 1995 .
[7] S.C.H. Lu,et al. Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants , 1994 .
[8] C. R. Glassey,et al. Linear control rules for production control of semiconductor fabs , 1996 .
[9] Mauricio G. C. Resende,et al. Closed-loop job release control for VLSI circuit manufacturing , 1988 .
[10] T. Ohmi,et al. Plasma enhanced in situ chamber cleaning evaluated by extracted-plasma-parameter analysis , 1996 .
[11] Norio Suzuki,et al. A new LSI manufacturing scheme in the large-diameter wafer era for super-quick TAT development and volume production , 1995, Proceedings of International Symposium on Semiconductor Manufacturing.
[12] Hidetoshi Koike,et al. Simple and quick turnaround time fabrication process for deep submicrometer CMOS generation , 1996 .
[13] M. Moslehi,et al. Microelectronics manufacturing science and technology (MMST): single-wafer RTP-based 0.35 /spl mu/m CMOS IC fabrication , 1993, Proceedings of IEEE International Electron Devices Meeting.
[14] J. Murota,et al. Selective etching of native oxide by dry processing using ultra clean anhydrous hydrogen fluoride , 1988, Technical Digest., International Electron Devices Meeting.
[15] K. Shibata. CIM Systems In An Advanced Semiconductor Factory , 1994, International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM.